| 规格 | 底座规格(mm) | 000级平面度 | 00级平面度 | 0级平面度 | 重量(kg) |
| 3010 | 800X500X100 | 2um | 4um | 8um | 140 |
| 3017 | 800X500X100 | 2um | 4um | 8um | 150 |
| 5017 | 1000X500X150 | 2.5um | 4.5um | 9um | 250 |
| 5025 | 1000X500X150 | 2.5um | 4.5um | 9um | 260 |
| 5030 | 1000X500X150 | 2.5um | 4.5um | 9um | 270 |
| 10017 | 1500X500X200 | 3um | 6um | 12um | 470 |
| 10025 | 1500X500X200 | 3um | 6um | 12um | 480 |
| 10030 | 1500X500X200 | 3um | 6um | 12um | 490 |
| 15017 | 2000X500X250 | 3.5um | 7um | 14um | 770 |
| 15025 | 2000X500X250 | 3.5um | 7um | 14um | 780 |
| 15030 | 2000X500X250 | 3.5um | 7um | 14um | 790 |
| 20017 | 2500X500X300 | 4um | 8um | 16um | 1150 |
| 20025 | 2500X500X300 | 4um | 8um | 16um | 1160 |
| 20030 | 2500X500X300 | 4um | 8um | 16um | 1170 |

冀公网安备13098102000324 号