| 规格(AXB) | C | D | E | 底座平面度 | 底座平面度 | 底座 平面度 | 重量 |
| 150mmX150mm | 260mm | 200mm | 85mm | 0级6um | 00级3um | 000级1.5um | 10kg |
| 200mmX150mm | 260mm | 200mm | 85mm | 0级6um | 00级3um | 000级1.5um | 15kg |
| 200mmX200mm | 260mm | 200mm | 85mm | 0级6um | 00级3um | 000级1.5um | 20kg |
| 300mmX200mm | 260mm | 200mm | 85mm | 0级6um | 00级3um | 000级1.5um | 25kg |
| 300mmX300mm | 260mm | 200mm | 85mm | 0级6um | 00级3um | 000级1.5um | 30kg |

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